O'Reilly logo

Transmission Electron Microscopy in Micro-nanoelectronics by Alain Claverie

Stay ahead with the world's most comprehensive technology and business learning platform.

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, tutorials, and more.

Start Free Trial

No credit card required

Chapter 6

Interdiffusion and Chemical Reaction at Interfaces by TEM/EELS

6.1. Introduction

The purpose of this chapter is to show how research on interdiffusion and chemical reactions in thin films and their interface with semiconductor substrates can be conducted using the transmission electron microscopy (TEM) based method and their coupling with electron energy-loss spectroscopy (EELS). Analytical TEMs commonly installed nowadays in most materials science laboratories are mainly considered in this study. The discussion will be illustrated in the context of the developments of new gate oxides (commonly called high-k or HK) for the replacement of SiO2 in metal oxide semiconductor field-effect transistors (MOSFETs). Literature data from HfO2, which is already integrated in MOSFET production since end of 2007 [BOH 07] and of rare earth-based oxides (REO), will be particularly discussed together with results obtained at CEMES.

6.2. Importance of interfaces in MOSFETs

For several decades, the microelectronics industry succeeded in reducing the size of the components with an outstanding efficiency and regularity. The gate length of the key component, the MOSFETs, has scaled down from several microns in 1971 to some tens of nanometers nowadays. The Si/SiO2 couple, the heart of microelectronics devices, was the chosen ally for the successful scaling because it is a system that presents several intrinsic qualities unrivaled to date. First, an amorphous SiO2 layer can be thermally grown ...

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, interactive tutorials, and more.

Start Free Trial

No credit card required