Wafer Manufacturing

1Wafers and Semiconductors

1.1 Introduction

The fundamental building block from which microelectronic integrated circuit (IC) chips, MEMS (micro electro mechanical systems) devices, and microelectronic devices and systems are constructed is called a “wafer.” This book discusses the nuances of the wafer manufacturing (or wafer production) technology and process, as well as the recent research and development contributing to the growth of the technologies in wafer manufacturing. Each chapter has a References section at the end to provide a list of books and articles for reference and further reading or study on the subjects presented.

This chapter provides basic information about wafers and the semiconductor revolution that has influenced our modern daily lives, including the subjects of silicon, wafers, mechanical materials, and surface properties.

1.2 Semiconductor Revolution

1.2.1 Classification of Materials

Materials are classified, based on their electrical conductivity, into the following four categories: conductor, insulator, superconductor, and semiconductor. Table 1.1 lists a few selected materials in the three most common categories and their resistivity values in m. The resistance of a material, is defined as follows

(1.1)

where is the resistivity and and are ...