2Industrial Perspectives of SiC Bulk Growth
Adrian R. Powell
CREE, Inc., 4600 Silicon Drive, Durham, NC, 27703, USA
2.1 Introduction
In this chapter, we discuss the inherent differences between growing SiC wafers for specialized high‐end niche markets and the production of SiC wafers substrates for large‐volume manufacturing. Both are critical in developing a robust commercial market. In the case of SiC, many academic and industrial players have contributed to the impressive ramp in quality and diameter that SiC wafers have experienced over the last 30 years. Figure 2.1 shows how the maximum diameter of SiC wafers has increased since the first commercial release in 1991 along with some of the critical milestones [1–4].
Currently, there are ...
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