Applied Optics Fundamentals and Device Applications

7MEMS, MOEMS, Nano, and Bionanotechnologies

7.1 Introduction

The simple distinction between the terms micro-electro-mechanical systems (MEMSs) and nanotechnology is the size of the devices: MEMSs typically range between millimeters down to microns and nano devices are on the nanometer scale. Quoting an excellent set of definitions from SmallTech Consulting [1]:

MEMS is the integration of a number of microcomponents on a single chip which allows the microsystem to both sense and control the environment. The components typically include microelectronic integrated circuits (the “brains”), sensors (the “senses” and “nervous system”), and actuators (the “hands” and “arms”). The components are typically integrated on a single chip using microfabrication ...