Electrical Contacts, 2nd Edition

12

Low Current and High Frequency Miniature Switches: Microelectromechanical Systems (MEMS), Metal Contact Switches

Benjamin F. Toler, Ronald A. Coutu, Jr., and John W. McBride

Transparent forms, too fine for human sight

Rape of the Lock, Alexander Pope

In small proportions we just beauties see;

And in short measure life may perfect be.

Short Measures (from an Ode), Ben Johnson

CONTENTS

12.1    Introduction

12.1.1    Common MEMS Actuation Methods

12.2    Micro-Contact Resistance Modeling

12.3    Contact Materials for Performance and Reliability

12.4    Failure Modes and Reliability

12.5    Conclusion

References

12.1  Introduction

In this chapter, we will concentrate on the effect of very low contact forces on the design of microelectromechanical ...