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Low Current and High Frequency Miniature Switches: Microelectromechanical Systems (MEMS), Metal Contact Switches
Benjamin F. Toler, Ronald A. Coutu, Jr., and John W. McBride
Transparent forms, too fine for human sight
Rape of the Lock, Alexander Pope
In small proportions we just beauties see;
And in short measure life may perfect be.
Short Measures (from an Ode), Ben Johnson
12.1.1 Common MEMS Actuation Methods
12.2 Micro-Contact Resistance Modeling
12.3 Contact Materials for Performance and Reliability
12.4 Failure Modes and Reliability
In this chapter, we will concentrate on the effect of very low contact forces on the design of microelectromechanical ...