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Environanotechnology by Ian G. Wright, Rachid Slimane, Zhonglin Wang, Alan E. Bland, C.P. Huang, Maohong Fan

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CHAPTER 6

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Nanostructured Metal Oxide Gas Sensors for Air-Quality Monitoring

David G. Rickerby* and Alessandra M. Serventi**

* European Commission Joint Research Centre, Institute for Environment and Sustainability, 21020 Ispra VA, Italy

** Institut de Recherche d’Hydro-Québec, Varennes, Québec J3X 1S1 Canada

Contents

1. Introduction

2. The Gas-Sensing Mechanism

3. Effect of Catalyst and Electrical Contact Materials

4. Thin-Film Deposition Methods

5. Influence of Film Structure on Sensor Response

5.1. Radio-Frequency Sputtering

5.2. Pulsed Laser Deposition

6. Integrated Solid-State Sensors

7. Thick-Film Technology

8. Innovative Metal Oxide ...

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