Epitaxial Growth of Complex Metal Oxides

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Woodhead Publishing Series in Electronic and Optical Materials

Part One. Epitaxial growth of complex metal oxides

1. Growth studies of heteroepitaxial oxide thin films using reflection high-energy electron diffraction (RHEED)

1.1. Introduction: reflection high-energy electron diffraction and pulsed laser deposition

1.2. Basic principles of RHEED

1.3. Variations of the specular intensity during deposition

1.4. RHEED intensity variations during heteroepitaxy: examples

1.5. Conclusions

2. Sputtering techniques for epitaxial growth of complex oxides

2.1. Introduction

2.2. General considerations for sputtering of complex oxides

2.3. A practical guide to the sputtered growth of perovskite ...