66Semiconductor Equipment and Materials International Interface and Communication Standards: An Overview with Case Studies

Kiah Mok Goh

Singapore Institute of Manufacturing Technology

Lay Siong Goh

Singapore Institute of Manufacturing Technology

Geok Hong Phua

Singapore Institute of Manufacturing Technology

Aik Meng Fong

Singapore Institute of Manufacturing Technology

Yan Guan Lim

Singapore Institute of Manufacturing Technology

Ke Yi

Singapore Institute of Manufacturing Technology

Oo Tin

Singapore Institute of Manufacturing Technology

  1. 66.1 Introduction to SEMI

  2. 66.2 SEMI Equipment Communication Standard

    1. Four Main SEMI Communications/Control Standards

    2. SECS-I

    3. High-Speed SECS Message Services Standard

    4. SEMI Communication Standard (SECS-II)

    5. Generic ...

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