Manufacturing Engineering and Technology, 8th in SI Units by Pearson

Chapter 29

Fabrication of Microelectromechanical Devices and Systems and Nanoscale Manufacturing

29.1 Introduction

29.2 Micromachining of MEMS Devices

29.3 Electroforming-based Processes

29.4 Solid Free-form Fabrication of Devices

29.5 Mesoscale Manufacturing

29.6 Nanoscale Manufacturing

Examples:

29.1 Surface Micromachining of a Hinge

29.2 Operation and Fabrication Sequence for a Thermal Ink-jet Printer

29.3 Production of Rare-earth Magnets

Case Studies:

29.1 Digital Micromirror Device

29.2 Photonic Integrated Circuits

 

• Many of the processes and materials used for manufacturing microelectronic devices are also used for manufacturing micromechanical devices and microelectromechanical systems; this chapter investigates topics in the production ...