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MOS Capacitor and MOSFET

The metal-oxide-semiconductor (MOS) capacitor is of paramount importance in semiconductor device physics because the device is extensively used in the study of semiconductor surfaces.* In integrated circuits, the device is used as storage capacitor and forms the basic building block for charge-coupled devices (CCD). The metal-oxide semiconductor field-effect transistor (MOSFET) is composed of an MOS capacitor and two p-n junctions placed immediately adjacent to the MOS capacitor.1 Since its first demonstration in 1960, the MOSFET has been developed quickly and has become the most important device for advanced ...

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