Semiconductor Devices: Physics and Technology, 3rd Edition

5

MOS Capacitor and MOSFET

5.1 IDEAL MOS CAPACITOR

5.2 SIO₂-SI MOS CAPACITOR

5.3 CARRIER TRANSPORT IN MOS CAPACITORS

5.4 CHARGE-COUPLED DEVICES

5.5 MOSFET FUNDAMENTALS

SUMMARY

The metal-oxide-semiconductor (MOS) capacitor is of paramount importance in semiconductor device physics because the device is extensively used in the study of semiconductor surfaces.* In integrated circuits, the device is used as storage capacitor and forms the basic building block for charge-coupled devices (CCD). The metal-oxide semiconductor field-effect transistor (MOSFET) is composed of an MOS capacitor and two p-n junctions placed immediately adjacent to the MOS capacitor.¹ Since its first demonstration in 1960, the MOSFET has been developed quickly and has become the most important device for advanced ...