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Semiconductor Devices: Physics and Technology, 3rd Edition by Ming-Kwei Lee, Simon M. Sze

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Advanced MOSFET and Related Devices

MOSFET is the most important device in modern high-density advanced integrated circuits (IC). We have considered the basic characteristics of the so-called long-channel MOSFET in the previous chapter. Since 1970 the gate length of MOSFETs in production ICs has been scaled down at a rate about 13% per year, and it will continue to shrink in the foreseeable future. The reduction of device dimensions is driven by requirements for both performance and density. In this chapter we will consider some advanced topics on MOSFET scaling, novel scaled device structures, and logic and memory devices.

Specifically, we cover the following topics: ...

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