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Semiconductor Devices: Physics and Technology, 3rd Edition by Ming-Kwei Lee, Simon M. Sze

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Crystal Growth and Epitaxy

As discussed in Chapter 1, the two most important semiconductors for discrete devices and integrated circuits are silicon and gallium arsenide. In this chapter we describe the common techniques for growing single crystals of these two semiconductors. The starting materials, silicon dioxide for a silicon wafer and gallium and arsenic for a gallium arsenide wafer, are chemically processed to form a high-purity polycrystalline semiconductor ...

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