3 Fundamentals of Molecular Layer Deposition (MLD)

As described in Chapter 1, to realize high-performance photonic/electronic devices consisting of organic functional thin films, growth methods for polymer wires and molecular wires with designated (1) molecular sequences, (2) locations, and (3) orientations are essential. Molecular layer deposition (MLD) [1, 2, 3, 4, 5 and 6] is a method to grow polymer wires and molecular wires with designed molecular sequences, enabling precisely controlled growth of artificial polymer wires and molecular wires. MLD for growth of polymer wires utilizes chemical reactions between source molecules. MLD for growth of molecular wires, in which different kinds of molecules are aligned in designated sequences, utilizes ...

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