VLSI

9 Nanoelectromechanical RelaysAn Energy Efficient Alternative in Logic Design

Ramakrishnan Venkatasubramanian and Poras T. Balsara

Contents

9.1 Introduction

9.2 CMOS Replacement Devices: Mechanical Relays

9.2.1 Electrostatically Actuated Nanoelectromechanical Relay Devices

9.2.2 NEM Relay Devices

9.2.2.1 Cantilever Beam and Laterally Actuated NEM Relays

9.2.2.2 Suspended Gate Relays

9.3 Verilog-A Model of Suspended Gate Relay

9.3.1 Definition of NEM Relay Parameters

9.3.2 Electromechanical System Model

9.4 NEM Relay–Based Digital Logic Design

9.4.1 Intrinsic Capacitance of the Relay (C_int)

9.4.1.1 Relay-Based Latch Circuits

9.4.1.2 Relay-Based Flop Circuits: Tristate Relay Flop

9.4.1.3 Max Frequency of Operation and Min-Pulse Width

9.4.1.4 ...