November 2014
Intermediate to advanced
234 pages
6h 58m
English
Content preview from Developments in Surface Contamination and Cleaning, Volume 8
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Chapter 5
A Brief Review of the Cleaning Process for Electronic Device Fabrication
Mahmood Toofan*; Jahansooz Toofan† * Semiconductor Analytical Services, Inc. (SAS, Inc.), Milpitas, California, USA† Department of Chemistry, California State University Sacramento, Sacramento, California, USA
Abstract
This chapter presents a brief review of some of the important aspects of cleaning solutions used in fabrication of electronic devices. The organic and inorganic types of contamination are considered. Additionally, basic cleaning processes for ionic and covalent-bonded particles on the surface of substrates are pointed out. The effects of high or low pH of cleaning solutions in simple form, without using mathematical calculations, are also ...
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