Electrical Engineer's Reference Book, 16th Edition

6

Semiconductor, Thick and Thin-Film Microcircuits

W Eccleston, MSc, PhD, CEng, FIEE,     University of Liverpool (Section 6.1)

D Grieve, BSc,     Welwyn Components, Bedlington (Section 6.2)

Contents

Silicon, silicon dioxide, thick- and thin-film technology 6.1

Materials for integration 6.1.1

Silicon and impurities 6.1.2

Mobility and the materials limitations of device size 6.1.3

Materials for large-area circuits 6.1.4

Thick- and thin-film microcircuits 6.2

Thick-film materials 6.2.1

Thin-film materials 6.2.2

Types of hybrids, and their applications 6.2.3

6.1 Silicon, silicon dioxide, thick- and thin-film technology

Silicon is unrivalled as a semiconductor material for active devices such as rectifiers, metal oxide semiconductor ...