8 Piezoelectric Thin Films and Their Application to Vibration Energy Harvesters
CONTENTS
8.1.2 Piezoelectric Thin Films
8.2 Preparation of Piezoelectric PZT Thin Films
8.2.1 Deposition of PZT Thin Films for MEMS
8.2.3 Crystal Structure of PZT Thin Films
8.2.4 Evaluation of Piezoelectric Properties for Thin Films
8.3 Lead- Free Piezoelectric Thin Films
8.3.1 Piezoelectric Properties of KNN Thin Films
8.3.2 Microfabrication of KNN Thin Films
8.4 Vibration Energy Harvesters
8.4.1 Piezoelectric MEMS Energy Harvesters
8.4.2 Power Generation of PZT and KNN Thin Films
8.1 Introduction ...
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