Formal Methods in Manufacturing

19	Scheduling of Semiconductor Manufacturing Systems Using Petri Nets Fei Qiao and Zhou MengChu

CONTENTS

19.1 Introduction

19.2 Petri Nets and Their Extensions

19.2.1 Coloured Petri Nets

19.2.2 Timed Petri Nets

19.2.3 Stochastic Petri Nets

19.3 Hierarchical Coloured Timed Petri Net

19.3.1 Definition of HCTPN

19.3.2 Modelling Wafer Fabrication with HCTPN

19.3.2.1 Fabrication Layer

19.3.2.2 Machine Group Layer

19.3.2.3 Equipment Layer

19.3.3 Decision Point in HCTPN Model

19.4 Extended Genetic Algorithm Embedded Scheduler Based on HCTPN

19.4.1 Machine Group–Based Chromosome Representation

19.4.2 Simulation-Based Evaluation

19.4.3 Reproduction with Vaccine Inoculation

19.4.4 Immune Selection

19.5 Experiment and Results

19.5.1 HCTPN Model–Based ...