Brief Table of Contents
Chapter One. Properties of Silicon
Chapter Two. Czochralski Growth of Silicon Crystals
Chapter Three. Properties of Silicon Crystals
Chapter Four. Oxygen in Silicon
Chapter Nine. Multiscale Modeling Methods
Chapter Ten. Manufacture and Processing of MEMS Structures
Chapter Eleven. Mechanical Properties of Silicon Microstructures
Chapter Twelve. Electrostatic and RF-Properties of MEMS Structures
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