Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning

Index

Note: Page numbers followed by “f” and “t” refer to figures and tables, respectively.

A

Acoustic boundary layer, 146

Acoustic streaming, 146, 147–148

Actinide species, fluorination of

alternative gas chemistries for, 57–59

Advanced oxidation process (AOP), 158–159

Aerosol cleaning, 137f, 154–156

Airborne molecular contaminants (AMCs), 29–30

Ammonia–alkali peroxide mixture (APM) treatments, 2, 144, 144, 145, 156–157, 157, 165

Anionic modifiers, 180

Aqueous displacement solution (ADS) cleaning process, 177, 178f

drying, 180–181

hydrophilicity and wettability, evaluation for, 181

process flow diagram, 178f, 178f

requirements and parameters, 178–180

results of displacement tests, 182–186

Atmospheric pressure plasma, 58

Atomic force microscopy ...