Electronics in Advanced Research Industries

6Advanced Optoelectronic and Micro‐/Nanosensors

This chapter proposes innovative and scientific solutions for nanocomposite and microelectromechanical system (MEMS) and nanoelectromechanical system (NEMS) sensors, by discussing the approaches to follow for the characterization of nanotechnology‐based sensors from the perspective of producing innovative devices. The characterization concerns the use of specific machines and laboratory facilities. This chapter includes a section on possible experimental setups useful for nanocomposite sensor testing and provides more fundamental physical concepts for micro‐ and nanosensor prototyping. The main goal is to analyze some methods for theoretical characterization, the design and the fabrication of advanced optoelectronic and micro‐/nanosensors useful in the research and development (R&D) industry. Starting with a discussion of measurement methodologies for the morphological characterization of thin films and nanoparticles (NPs), the study moves to (i) nanocomposite tip probes for optical enhancement, (ii) edge plasmonic resonance detecting liquids or dielectric contrasts identifying materials, (iii) nanocomposite pillars for liquids and loss detection in robotic finger integration, (iv) high sensitivity nanocomposite tactile pressure sensors detecting object shape profiles, small notches and pressure forces in general, and (v) thin film materials realizing GHz pressure sensors, and optical biomedical antennas based on rectangular micro ...