CONTENTS
10.2 DNA Nanostructures as a Self-Assembled Template
10.2.1 Nanoscale Patterning of Metal
10.2.2 Alignment of Molecules, Nanocrystals, and Carbon Nanotubes
10.3 DNA Nanostructures as a Catalytically Active Mask for Patterning SiO2
10.3.1 Conventional Methods for SiO2 Etching
10.3.2 Mechanism of SiO2 Etching by HF
10.3.3 DNA-Mediated Etching of SiO2
10.4 Applications and Future Directions
10.1 INTRODUCTION
10.1.1 NANOLITHOGRAPHY
The development of integrated circuits and microchips has led to a new paradigm of smart computing and Internet devices. Photolithography, ...
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