A
Abbe prism, 104
ACOS algorithm
estimated thickness profile, 764–765
phase estimation, 761
Acousto-optic modulator (AOM), 434
frequency fluctuation, 306–307
AF, see Auto-focus (AF)
Air refractive index, 406
Ciddor’s equation, 415
Edlén equations, 415
interference phase topography, 417
Lorenz–Lorentz equation, 415
refractometric methods, 415
vacuum cell, 416
wavelength, 414
Amplitude modulation (AM), 313, 446
Antireflection coating (AR coating), 208, 244, 312, 407, 437, 729–730
APD, see Avalanche photodiode (APD)
Apertureless probe, 391, 393–394
Aspheric surfaces, 98
Astigmatism method, 91–92, 99, 220, 481–482
Atomic force microscope (AFM), 393, 396, 810–811
Atomic force/photon ...
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