December 2017
Intermediate to advanced
926 pages
22h 26m
English
Content preview from CMOS Analog Integrated Circuits
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Physical Design of MOS Integrated Circuits
CONTENTS
3.3 Integrated-circuit (IC) interconnects
3.4 Physical design considerations
Modern lithography systems used in the integrated circuit (IC) fabrication employ an optical projection printing that operates almost at the diffraction limit. The mask of each IC layout layer is projected onto the wafer substrate, which has been coated with a photoresist material, also called resist. The structure of the resist is altered by the exposure to light so that, after the development, a silicon pattern can emerge. The next ...
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