
xi
Preface
The aim of this book is to develop an integrated micro gas sensor that is com-
patible with modern semiconductor fabrication facilities so that a small, com-
pact, and low-power device can be created that will be useful in analyzing
air ambience with handheld systems. Such miniaturized systems need a good
sensor capable of identifying different gaseous species. As of today, there are
no specic sensing elements for a specic gaseous species, which makes the
task of identifying them even more difcult. The study of metal oxides provides
enough indication that they are sensitive to a group of species, and develop-
ment of such devices is ...