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2
Miniaturized Solid-State Gas Sensors
2.1 Gas Chromatography–Mass Spectrometry
The use of a mass spectrometer as the detector in gas chromatography was
developed in the 1950s by Gohlke and McLafferty [5,6]. This is a chemical
analysis instrument for separating gaseous species in a complex sample. The
system uses a ow-through narrow tube, known as the column, through
which different gaseous species of a test gas pass in a stream at different
rates depending on their various chemical and physical properties. As the
gaseous species exit at the end of the column, they are detected and identi-
ed electronically. The stationary phase in