Preface
The transition from microelectronics to nanoelectronics occurred at the dawn of the new millennium. It was the production of CMOS devices with a 100 nm feature size that delineated the beginning of the nanoelectronics era. Microelectronics was developed for more than 50 years since the bipolar transistor was invented in 1947. During this time, there was an enormous progress in the development of integrated circuit (IC) technologies. The invention of MOSFET in 1960 and of the CMOS circuit in 1963 ignited the exponential shrinkage of devices, called scaling, and device scaling has been going on for more than 48 years. Every three years, the average design rule has shrunk to the 70 percent of the previous generation. Such a rate of shrinkage ...
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