Chapter 37. Defect and Fault Tolerance
André DeHonDepartment of Electrical and Systems EngineeringUniversity of Pennsylvania
As device size F continues to shrink, it approaches the scale of individual atoms and molecules. In 2007, 65-nm integrated circuits are in volume production for processors and field-programmable gate arrays (FPGAs). With atom spacing in a silicon lattice around 0.5 nm, F = 65-nm drawn features are a little more than 100 atoms wide. Key features, such as gate lengths, are effectively half or a third this size. Continued geometric scaling (e.g., reducing the feature size by a factor of 2 every six years) will take us to the realm where feature sizes are measured in single-digit atoms sometime in the next couple of decades. ...
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