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Semiconductor Gas Sensors by O Tan, R Jaaniso

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12

Porous silicon gas sensors

V.M. Aroutiounian,     Yerevan State University, Armenia

Abstract:

This chapter discusses the use of porous silicon (PSi) for gas sensors. It is of great importance to develop efficient and economically viable gas sensors for different applications. PSi can be used as an alternative material for gas sensors, operating at a relatively low temperature, including room temperature. The interest in this material is mainly due to its extremely high surface-to-volume ratio, the ease of its formation and its compatibility with modern silicon microelectronics fabrication technologies. A large variety of different sensors made of PSi have been manufactured in recent years, and achievements in this field are reported in ...

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