Contents
Takashi Yamaguchi
1.1 Concept of High-Speed Precision Motion Control
2 System Modeling and Identification
Hiroshi Uchida, Takashi Yamaguchi, and Hidehiko Numasato
2.1.2 Generation of Servo Position Signal
2.3.3 Modeling of Mechanical Dynamics
2.4 Modeling of Disturbances and PES
2.4.2 Decomposition of Steady-State PES
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