High-Speed Precision Motion Control

Chapter 5

Ultra-Precise Position Control

Takenori Atsumi

Hitachi, Ltd.

Mituso Hirata

Utsunomiya University

Hiroshi Fujimoto

The University of Tokyo

Nobutaka Bando

Japan Aerospace Exploration Agency

5.1   Phase-Stable Design for High Servo Bandwidth

5.1.1   Modeling of Controlled Object

5.1.2   Controller Design Based on Vector Locus

5.1.2.1   Relationship between Vector Locus and Sensitivity Transfer Function

5.1.2.2   Vector Locus of Controlled Object

5.1.3   Controller Design

5.1.3.1   Case 1: Gain-Stable Design for All Mechanical Resonant Modes

5.1.3.2   Case 2: Phase-Stable Design for Primary Mechanical Resonant Mode

5.1.3.3   Case 3: Phase-Stable Design for All Mechanical Resonant Modes

5.1.3.4   Comparison of Control Performances

5.2   ...