book

Microfabrication and Precision Engineering

November 2016

Intermediate to advanced

286 pages

9h 29m

English

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Abstract1.1 Introduction1.2 Modeling of microscale cutting1.3 Modeling of nanoscale cuttingConclusionsReferences
Abstract2.1 Introduction2.2 Specific cutting energy2.3 Size effect2.4 Workpiece microstructure scale2.5 Surface integrityReferences
Abstract3.1 Introduction3.2 Principle of micromachining using the orbital motion of the diamond tip3.3 Micromachining setup and test of the stage’s trajectory3.4 Micromachining mechanism using the orbital motion of the tip3.5 Formation mechanism and control methods of burrs3.6 Effects of the processing parameters and fabrication of microstructures3.7 Summary and future worksAcknowledgmentsReferences

Abstract4.1 Introduction4.2 Principle of electrical discharge machining4.3 Overview of micro-EDM4.4 Differences between EDM and micro-EDM4.5 System components of micro-EDM4.6 Micro-EDM process parameters4.7 Performance criteria in micro-EDM4.8 Titanium alloys as advanced engineering materials4.9 Literature review of micro-EDM of Ti-6Al-4V4.10 Investigation of micro-EDM process employing innovative machining strategiesConclusionsAcknowledgementsReferences
Abstract5.1 Fundamentals of microelectrochemical machining5.2 Variety of micro-ECM processes5.3 Hybrid processes associated with microelectrochemical machining5.4 ConclusionsAcknowledgmentReferences
Abstract6.1 Introduction6.2 Important materials for MEMS and microfluidic devices6.3 Lasers for microfabrication6.4 Material removal mechanisms6.5 Laser microprocessing of materials6.6 Challenges and future of laser processingReferences
Abstract7.1 Introduction7.2 Laser as a machine tool7.3 Laser material interaction7.4 Laser beam cutting7.5 Underwater laser beam machining7.6 Pulsed IR laser ablation of Inconel 625 superalloy at submerged condition: A case studyConclusionAcknowledgmentReferences
Abstract8.1 Application of microstructures8.2 Fundamental of glass molding technique8.3 Modeling and simulation of microstructure molding8.4 Glass molding process for microstructures8.5 SummaryReferences