book

Modeling and Control of Precision Actuators

by Tan Kok Tan Kok Kiong, Huang Sunan

October 2018

Intermediate to advanced

270 pages

6h 47m

English

CRC Press

Read now

Unlock full access

Cover
Half Title
Title Page
Copyright Page
Table of Contents
Preface
Acknowledgments
About the Authors
1. Introduction
1.1 Growing Interest in Precise Actuators1.2 Types of Precise Actuators1.2.1 Piezoelectric Actuator1.2.1.1 Stack Actuator1.2.1.2 Piezoelectric Shear Actuator1.2.1.3 Piezoelectric Bending Actuator1.2.2 Linear Motor1.2.2.1 Permanent Magnet Linear Motor1.2.2.2 Linear Piezo Stage1.2.2.3 Linear Air Bearing Stage1.3 Applications of Precise ActuatorsReferences
2. Nonlinear Dynamics and Modeling
2.1 Hysteresis2.2 Creep2.3 Friction2.4 Force RipplesReferences

3. Identification and Compensation of Preisach Hysteresis in Piezoelectric Actuators
3.1 SVD-Based Identification and Compensation of Preisach Hysteresis3.1.1 Parameter Identification of Preisach Hysteresis3.1.1.1 Least-Squares Estimation by SVD3.1.1.2 Identification Revision Using SVD Updating3.1.1.3 Simulation Study of Proposed Identification Approach3.1.2 Compensation Strategy of Preisach Hysteresis3.1.2.1 Preisach-Based Inversion Compensation3.1.2.2 Proposed Composite Control Strategy3.1.2.3 Simulation Study of Proposed Compensation Strategy3.1.3 Experimental Studies3.1.3.1 Experimental Setup3.1.3.2 Hysteresis Identification at Low Frequencies3.1.3.3 Performance of Proposed Composite Controller at Low Frequencies3.1.3.4 Performance of Proposed Composite Controller at Higher Frequencies3.1.4 Discussions3.2 High-Bandwidth Identification and Compensation of Hysteretic Dynamics in Piezoelectric Actuators3.2.1 Proposed Model Identification Strategy3.2.1.1 Model of PA Systems3.2.1.2 Identification of Quasi-Static Hysteresis3.2.2 Proposed Composite Controller3.2.2.1 Analysis of Feedforward and Feedback Controllers at High Frequencies3.2.2.2 Design of Feedforward Controller3.2.2.3 Design of Feedback Controller3.2.3 Experimental Studies3.2.3.1 Identification of Quasi-Static Hysteresis3.2.3.2 Drift Suppression3.2.3.3 Preisach Hysteresis Identification3.2.3.4 Identification of Nonhysteresic Dynamics3.2.3.5 Controller Design3.2.3.6 Performance Evaluation3.2.4 Discussions 3.3 Concluding RemarksReferences
4. Identification and Compensation of Friction and Ripple Force
4.1 Relay Feedback Techniques for Precision Motion Control4.2 Identification and Compensation of Friction Model4.2.1 System Model 4.2.2 DCR Feedback System4.2.3 Friction Modeling Using DCR Feedback4.2.3.1 Low-Velocity Mode: Static Friction Identification4.2.3.2 High-Velocity Mode: Coulomb and Viscous Friction Identification4.2.3.3 Estimating the Boundary Lubrication Velocity by Optimization4.2.4 Simulation4.2.4.1 Limit Cycle Variation with Relay Gains4.2.4.2 Phase 1: Low-Velocity Mode4.2.4.3 Phase 2: High-Velocity Mode4.2.4.4 Estimation of δ via Optimization4.2.5 Real-Time Experiments4.3 Modeling and Compensation of Ripples and Friction in Permanent Magnet Linear Motors4.3.1 Overall PMLM Model4.3.2 Model Identification4.3.2.1 Dual-Input Describing Function (DIDF) for Nonlinear Portion of PMLM Model4.3.2.2 Parameter Estimation from Harmonic Balance4.3.2.3 Extraction of Frequency Components from DFT4.3.3 Simulation4.3.4 Real-Time Experiments4.3.4.1 Identification of the Spatial Cogging Frequency4.3.4.2 Parameter Estimation4.3.4.3 Model CompensationReferences
5. Model Predictive Control of Precise Actuators
5.1 Model Predictive Control Concepts for Motion Tracking5.1.1 Prediction and Optimization5.1.2 Offset-Free and Robust MPC5.1.2.1 Offset-Free Tracking5.1.2.2 Robust Formulation5.2 Hybrid MPC for Ultrasonic Motors5.2.1 Piecewise Affine Model of Motion5.2.2 Model Predictive Control for PWA Model5.2.2.1 Terminal Gain5.2.2.2 Terminal Cost5.2.2.3 Terminal Set5.3 From Parametric MPC to PID Gain Scheduling Controllers5.4 Simulation Study and Experiment Results5.4.1 Simulation Studies5.4.2 Experiment5.5 Concluding RemarksReferences
6. Modeling and Control of Air Bearing Stages.
6.1 Problem Statements 6.2 Control of Linear Air Bearing Stage6.3 Controller Design for the System6.4 Experimental Results6.5 Control of Spherical Air Bearing Stage 6.5.1 Mechanical Structure 6.5.1.1 Voice Coil Actuators6.5.1.2 Pneumatic System6.5.2 Control System 6.5.2.1 Hardware of Control System 6.5.2.2 Modeling of Air Bearing Stage6.5.2.3 Parameter Identification6.5.2.4 Noise Filter6.5.2.5 Model-Based Controller Design6.6 Performance Analysis of Spherical Air Bearing System6.6.1 Model Identification6.6.2 Noise Filter6.6.3 Control Results 6.7 Concluding RemarksReferences
7. Fault Detection and Accommodation in Actuators
7.1 Problem Statements 7.2 Types of Failure 7.2.1 Examples of Actuator Failure 7.2.2 Sensor Failure 7.3 Fault Diagnosis Scheme 7.3.1 Fault Detection 7.3.2 Fault Isolation 7.3.3 Fault Identification7.4 Control of the System under No-Fault Condition 7.5 Accommodation Control after Fault Detection 7.6 Extension to Output Feedback Control Design7.6.1 Fault Diagnosis Scheme 7.6.1.1 Fault Detection7.6.1.2 Fault Isolation7.6.2 Robust Control for the System under No-Fault Condition 7.6.3 Accommodation Control after Fault Detection7.7 Experimental Tests 7.8 Concluding RemarksReferences
8. Case Studies of Precise Actuator Applications
8.1 Robust Adaptive Control of Piezoelectric Actuators with an Application to Intracytoplasmic Sperm Injection8.1.1 Modeling of the Piezoelectric Actuator8.1.2 Robust Adaptive Control8.1.3 Experimental Results8.1.4 Biomedical Application8.1.4.1 Instruments8.1.4.2 The Structure of Oocytes8.1.4.3 ICSI Process8.1.4.4 Results8.2 Control of a 2-DOF Ultrasonic Piezomotor Stage for Grommet Insertion8.2.1 Background8.2.1.1 Control Objectives8.2.2 System Modeling8.2.2.1 Model of Single-Axis USM Stage8.2.2.2 Model of 2-DOF USM Stage8.2.2.3 Parameter Estimation8.2.3 Controller Design8.2.3.1 LQR-Assisted PID Control8.2.3.2 Nonlinear Compensation8.2.3.3 Control of 2-DOF USM Stage8.2.4 Experimental Results8.3 Vision-Based Tracking and Thermal Monitoring of Nonstationary Targets8.3.1 Computer Imaging Technologies8.3.2 Decoupled Tracking and Thermal Monitoring8.3.2.1 Overall System Configuration8.3.2.2 Vision and Image Processing System8.3.2.3 Noncontact Temperature Measurement System8.3.2.4 Tracking Control of Linear Motor8.3.2.5 Practical Issues8.3.2.6 Experimental ResultsReferences
Index

Content preview from Modeling and Control of Precision Actuators

Preface

Much fundamental research, technologies, and applications are now moving toward achieving high-precision positioning and higher specifications in production, thus achievable with the requirements of precision motion control up to the order of the submicrometer or nanometer level. This is driven by the emergence of current technologies, such as high-precision manufacturing processes, machines, biotechnology, and nanotechnology. From the early 1980s, semiconductor and biomedical industries demanded high-precision actuators to execute more precise positioning and manufacturing in their processes, and the move toward ever-higher precision has continued to now. Requirements pertaining to the precision of motion vary substantially. As such, ...

Become an O’Reilly member and get unlimited access to this title plus top books and audiobooks from O’Reilly and nearly 200 top publishers, thousands of courses curated by job role, 150+ live events each month,
and much more.

Read now

Unlock full access

More than 5,000 organizations count on O’Reilly

O’Reilly covers everything we've got, with content to help us build a world-class technology community, upgrade the capabilities and competencies of our teams, and improve overall team performance as well as their engagement.

Julian F.

Head of Cybersecurity

I wanted to learn C and C++, but it didn't click for me until I picked up an O'Reilly book. When I went on the O’Reilly platform, I was astonished to find all the books there, plus live events and sandboxes so you could play around with the technology.

Addison B.

Field Engineer

I’ve been on the O’Reilly platform for more than eight years. I use a couple of learning platforms, but I'm on O'Reilly more than anybody else. When you're there, you start learning. I'm never disappointed.

Amir M.

Data Platform Tech Lead

I'm always learning. So when I got on to O'Reilly, I was like a kid in a candy store. There are playlists. There are answers. There's on-demand training. It's worth its weight in gold, in terms of what it allows me to do.

Mark W.

Embedded Software Engineer

An Introduction to System Modeling and Control

Publisher Resources

ISBN: 9781466556447

Cloud Computing

Data Engineering

Data Science

AI & ML

Programming Languages

Software Architecture

IT/Ops

Security

Design

Business

Soft Skills

Modeling and Control of Precision Actuators

by Tan Kok Tan Kok Kiong, Huang Sunan

Become an O’Reilly member and get unlimited access to this title plus top books and audiobooks from O’Reilly and nearly 200 top publishers, thousands of courses curated by job role, 150+ live events each month,
and much more.