October 2018
Intermediate to advanced
270 pages
6h 47m
English
Content preview from Modeling and Control of Precision Actuators
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A
control system
hardware of control system, 142–146
model-based controller design, 149–150
modeling, 146
parameter identification, 146–147
linear air bearing stage, 124–127
mechanical structure
spherical air bearing, performance analysis of, 150–155
model identification, 151
spherical air bearing stage, 137–150
system controller design, 127–133
Air bearing working principle, 8
Applications, precise actuators, 9–10, 177–241. See also Applications
in biology, 10
data storage, 10
grommet insertion, 2-DOF ultrasonic piezomotor stage, ...
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