Smart Sensors and MEMS, 2nd Edition

P

P-channel MOS (PMOS), 68–69, 69f

pA range, See Picoampere range (pA range)

Packaging, 523

shift and long-term stability, 80

WLP, 504–505

Paddle MEMS cantilevers, 393, 393f

Paradigm shifts, 2

Parallel plate capacitive sensor, 89, 89f

Parallel-plate actuator, 326, 326f

Parametric echo classification, 221–222

Parasitic capacitance, 175–177, 175f–177f

estimation, 212–214

issues, 181–183, 192–197, 193f

Parasitic capacitive effects, 175–176, 177f, 181, 182f–183f, 190–194, 202

circuit modification for estimation, 213f

monitoring, 212

nonnegligible sensor, 193f–194f

Parasitic effects, 107–108

Parasitic series resistance, 103–104, 104f

PAs, See Power amplifiers (PAs)

Paschen’s law, 315

Pass-through absolute minimization, 231

processing block, 237

Passive microfluidic mixers, ...