December 2012
Intermediate to advanced
264 pages
7h 17m
English
Content preview from Transmission Electron Microscopy in Micro-nanoelectronicsBecome an O’Reilly member and get unlimited access to this title plus top books and audiobooks from O’Reilly and nearly 200 top publishers, thousands of courses curated by job role, 150+ live events each month,
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Chapter 9
Specimen Preparation for Semiconductor Analysis
Specimen preparation is absolutely the key for quantitative transmission electron microscopy (TEM) analysis; modern transmission electron microscopes are very powerful and stable and, generally speaking, the accuracy of the analysis is now mainly limited by the quality of the specimen. It is a lot easier to learn how to make a good sample, than to perform the complicated analysis that is required for non-perfect TEM lamella.
One of the key differences between specimen preparation for semiconductor research and other fields is that in nearly all cases, nanometer-scale site specificity is required. In addition, such specimens can be made up of many different types of materials in this nanoscaled volume. As a result, the focused ion beam (FIB) milling tool is now indispensible. The FIB is an extremely versatile tool that uses an ion beam, metal deposition, micromanipulators and secondary electron detectors for cutting, sticking, modifying, connecting and imaging materials with nm-scale accuracy and resolution. There already exist many excellent books that present the FIB in detail. Here, we will only discuss the background of how specimens can be made. The FIB uses a beam of ions to remove material and then thin an electron transparent region of interest directly from a wafer to allow characterization in the TEM. In this chapter, we will briefly discuss the operation of the FIB, then ion beam–sample interactions and specimen ...
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O’Reilly covers everything we've got, with content to help us build a world-class technology community, upgrade the capabilities and competencies of our teams, and improve overall team performance as well as their engagement.Julian F.
I wanted to learn C and C++, but it didn't click for me until I picked up an O'Reilly book. When I went on the O’Reilly platform, I was astonished to find all the books there, plus live events and sandboxes so you could play around with the technology.Addison B.
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I'm always learning. So when I got on to O'Reilly, I was like a kid in a candy store. There are playlists. There are answers. There's on-demand training. It's worth its weight in gold, in terms of what it allows me to do.