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Transmission Electron Microscopy in Micro-nanoelectronics
book

Transmission Electron Microscopy in Micro-nanoelectronics

by Alain Claverie
December 2012
Intermediate to advanced
264 pages
7h 17m
English
Wiley
Content preview from Transmission Electron Microscopy in Micro-nanoelectronics

List of Authors

Gérard BEN ASSAYAG

CEMES/CNRS

Toulouse

France

 

Patrick BENZO

STMicroelectronics/CEMES

Grenoble

France

 

Nikolay CHERKASHIN

CEMES/CNRS

Toulouse

France

 

Alain CLAVERIE

CEMES/CNRS

Toulouse

France

 

Laurent CLÉMENT

STMicroelectronics

Crolles

France

 

David COOPER

CEA-LETI, Minatec

Grenoble

France

 

Dominique DELILLE

FEI Company

Eindhorer/Acht

Netherlands

 

Christophe GATEL

CEMES/CNRS

Toulouse

France

 

Florent HOUDELLIER

CEMES

Toulouse

France

 

Martin HŸTCH

CEMES/CNRS

Toulouse

France

 

Elsa JARON

CEMES

Toulouse

France

 

Aurélien MASSEBOEUF

CEMES/CNRS

Toulouse

France

 

Roland PANTEL

STMicroelectronics

Crolles

France

 

Shay REBOH

CEA/LETI

Grenoble

France

 

Sylvie SCHAMM-CHARDON

CEMES/CNRS

Toulouse

France

 

Germain SERVANTON

STMicroelectronics

Crolles

France

 

Etienne SNOECK

CEMES/CNRS

Toulouse

France

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Publisher Resources

ISBN: 9781118579053Purchase book