Future Trends in Microelectronics: Up the Nano Creek

Index

A/D converters, 103, 107, 330, 333

adhesion, 316, 317, 321

adsorption, 141, 247, 248, 252, 253, 256, 257

AlGaAs, 40, 49, 78, 84, 85, 107, 226, 227, 299, 338, 341, 342, 343, 346, 418, 419, 420, 421, 432, 435

AlGaInP, 431

algorithm, 5, 26, 103, 185

aluminum, 213, 214, 226, 402, 403, 404, 414, 419, 428

amorphous silicon, 164, 165, 322, 392, 394

antibody, 95

antireflection (AR) coating, 341

arsenic, 14, 15, 33, 44, 46, 47, 49, 51, 56, 61, 74-77, 81, 90, 97, 98, 104, 105, 110, 115, 117, 122, 127, 133, 137, 154, 156, 158, 161, 163, 165, 168, 171, 179, 187, 188, 193, 198, 203, 205, 206, 210, 213, 233, 234, 237, 241, 242, 243, 249, 251, 253, 259-263, 266-269, 271-275, 280, 282, 299, 301, 307, 311, 317, 321, 327, 330, 354, 361, 367, 369-373, 376, 377, 381, 386, 394, 398, 410, 415, 418, 419, 426, 427, 433, 437

atomic force microscopy (AFM), 56, 60, 234, 305, 306, 307, 309, 386

atomic layer deposition (ALD), 222, 235, 257

atomic layer doping, 247, 250, 256, 257

atomically controlled processing, 247, 256

ballistic transport, 215, 216, 218, 287, 294

band structure, 138, 207, 309

bandwidth, 107, 109, 282, 359, 360-364, 377, 378, 425, 426, 427, 428

BiCMOS, 276

biochip, 131, 147, 367

bioinformatics, 91

biomarker, 96

bit error rate (BER), 408

Boltzmann constant, 236

Bragg mirror, 382

buffer layer, 78, 138, 305, 307, 308

cadmium, 336

capacitance, 21, 26, 158, 193, 195, 215-221, 223, 297, 328, 329, 330, 377, 387, 424, 426

carbon, 27, 43, 55, 77, 84, 123, 154, 174, 175, 188, 191, 200, 208