Technologies for Smart Sensors and Sensor Fusion

8	All-Polymer Flexural Plate Wave Devices

Christoph Sielmann, John Berring, Suresha Mahadeva, John Robert Busch, Konrad Walus, and Boris Stoeber

CONTENTS

8.1    Introduction

8.1.1     Motivation

8.1.2     Acoustic Wave Microsensors

8.1.3     Gravimetric Sensing

8.2    Flexural Plate Waves

8.2.1     Background

8.2.2     Sensitivity

8.2.3     Low-Stiffness Substrate Effects

8.2.4     Limitations in Sensing

8.3    Fabrication

8.3.2     Framing

8.3.3     Inkjet Printing

8.3.4     FPW Device Testing

8.4    FPW Device Performance

8.4.1     Mass Loading

8.4.2     Gas Sensing

8.4.3     Polymer Characterization

8.4.4     Limitations in FPW Device Performance

8.5    Conclusions

References

8.1  INTRODUCTION

8.1.1  MOTIVATION

Versatile sensors and actuators ...