Technologies for Smart Sensors and Sensor Fusion

13	Micromachined Contactless Suspensions

Kirill V. Poletkin, Christopher Shearwood, Alexandr I. Chernomorsky, and Ulrike Wallrabe

CONTENTS

13.1.    Introduction

13.2.    Micromachined DTG, Based on a Contactless Suspension

13.2.1    Kinematics and Operating Principle

13.2.2    Mathematical Model

13.2.3    Analysis of the Model for a Particular Case

13.3.    Suspension with Zero Spring Constant

13.3.1    Kinematics and Operating Principle of the Suspension

13.3.2    Mathematical Model

13.3.3    Condition for Stable Levitation

13.3.4    Compensation of the Spring Constant

References

13.1  INTRODUCTION

Micromachined contactless suspension (CS) or non-contact bearing technology is a comparatively recent concept. This has already attracted a ...