Wafer Manufacturing

11Conclusion

Wafer manufacturing has been a field in which experience and engineering know‐how have played significant roles and have provided instrumental value to the industry. With the emergence of new technologies and research, the challenges are to understand the fundamental process modeling in various manufacturing processes of wafer production, and to be able to apply this new knowledge in the process control and management of wafering processes. The underlying principle of this book is to provide research experience and expertise in wafer manufacturing to provide a resource to researchers and practitioners alike in wafer manufacturing.

This book is organized into three categories, with each category including topics that are related to the broader subject of the category. The three categories are:

1. From crystal to prime wafers
2. Wafer forming
3. Wafer surface preparation and management.

Each category includes various topics presented by the chapters and sections that expound the broader subject of the category. They are summarized in the following.

11.1 (I) From Crystal to Prime Wafers

The first category presents the fundamental subject of wafer manufacturing from crystal to prime (or premium) wafers. This is best illustrated in Figure 2.1 in which the generalized process flow of wafer manufacturing from crystal growth to prime wafers is illustrated. Various topics are presented in order. This category I includes Chapters 1 to 3.

First of all, Chapter 1 starts out with ...