Wafer Manufacturing

Preface

This book is designed and written with both research and engineering practice in mind. Subjects pertaining to the fundamentals of wafer manufacturing and recent research advances are presented, as well as practical engineering and technology for practitioners in this industry. This book is ideal for a novice who wants to gain insightful information and knowledge about wafer manufacturing, and to learn how the prime (or premium) wafers that are used in microelectronics fabrication are produced. At the same time, this book is full of research topics and presentations of advances in fundamental knowledge about relevant manufacturing processes such that it will meet the needs of curious minds who want to investigate issues beyond the status quo and to study these processes with an objective to improve a myriad of related manufacturing processes.

Wafer manufacturing has been a field in which experience and engineering know‐how has played a significant role and was of instrumental value to the industry. With the emergence of new technology and research, the challenges are to understand fundamental process modeling in various manufacturing processes of wafer manufacturing, and to be able to apply this new knowledge in the process control and management of wafering processes. With the familiarity of both research issues and practical engineering, the authors strive to achieve the goals stated above.

The book is a must‐have for engineers and researchers in the field of wafer ...