3.1 Sublimation Growth3.2 Polytype Control in Sublimation Growth3.3 Defect Evolution and Reduction in Sublimation Growth3.4 Doping Control in Sublimation Growth3.5 High- Temperature Chemical Vapor Deposition3.6 Solution Growth3.7 3C-SiC Wafers Grown by Chemical Vapor Deposition3.8 Wafering and Polishing3.9 SummaryReferences