November 2016
Intermediate to advanced
212 pages
6h 54m
English
Chapter 1. Nonaqueous Cleaning Challenges for Preventing Damage to Fragile Nanostructures
2 Water-Caused Problems in Device Fabrication
4 Cryogenic Aerosol Nitrogen Cleaning
5 Supercritical Fluid Cleaning
Chapter 2. Gas-Phase Cleaning for Removal of Surface Contaminants
2 Surface Contamination and Cleanliness Levels
3 General Principles of Gas-Phase Cleaning
4 Process Variables in Gas-Phase Cleaning
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