CHAPTER 3

Structures of Semiconductor Surfaces and Origins of Surface Reactivity with Organic Molecules

YONGQUAN QU AND KELI HAN

In recent years, the interface of semiconductor materials has been a subject of intensive studies. Achieving rationally designed semiconductor surfaces with controllable configurations and special properties benefits the further applications of devices and lithography at the atomic level. Thus, various investigations have been performed to study the surface reactivity of organic molecules on semiconductor surfaces. Especially, single crystalline Si(100), Ge(100), Si(111), and diamond(100) are of particular interest. In this chapter, the surface structures and reactivity of the four semiconductor surfaces will be discussed.

3.1 INTRODUCTION

The chemistry of organic molecules on semiconductor surfaces has attracted much attention and has become a central issue in the field of surface chemistry [112]. Interaction between semiconductor surfaces and organic molecules is expected to be a crucial step toward applications in the areas of hybrid organic-semiconductor devices, biological devices, and nanolithography [112]. Many organic molecules, such as ketones, amino acids, nitrile compounds, and aromatic compounds, have been investigated to elucidate the mechanism of surface reactions between organic molecules and semiconductor surfaces. Investigations have shown that organic molecules containing more than one functional group cannot create a high degree of ...

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