5 Introduction to TCAD Process Simulation

In previous chapters, we discussed power electronics systems and integrated circuits (ICs) the semiconductor industry in general, and the fundamentals of smart power IC technology by following a top-down approach. Starting from this chapter, we are getting into the lowest and most fundamental level of device engineering. Before we explain the integrated power devices that are used in today’s power IC industry, we need to prepare the readers with some basic knowledge of technology computer-aided design (TCAD) simulation, since these will be used extensively from Chapters 7 to 10. TCAD simulations can be divided into two categories: process simulation and device simulation. This chapter discusses process ...

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