Deposition is one of the main fabrication tools used in microelectromechanical system (MEMS) fabrication to deposit thin films of materials. Deposition actually changes the surface properties of the base material on which it is deposited. In this chapter, we discuss the deposition of thin-film thickness between a few nanometres and about 100 μm. In MEMS technology, the film is patterned and can be subsequently etched away using the steps elaborated in the lithography chapter of this book.
MEMS deposition technology can be categorized into two ways. The first one is responsible for chemical reaction, i.e. chemical vapour deposition (CVD), electrodeposition, epitaxial growth, etc.
The second deposition process is due to physical ...
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