MEMS- and Nanotechnology-Enabled Sensor Applications
Microelectromechanical structure (MEMS) cannot be categorized to a specific discipline, rather the interdisciplinary nature of MEMS makes it available in every aspect of engineering and manufacturing technology including integrated circuit, mechanical engineering, materials science, electrical engineering and chemical engineering. MEMS packaging issues are also broad areas of research which deal with complexity of MEMS devices to make it available in the wide range of markets. MEMS can be found in the system ranging from automotive, medical, electronic, communication to defence applications. Current MEMS devices that we use in our everyday life include accelerometers ...
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