book

Microfabrication for Industrial Applications

by Regina Luttge

September 2011

Intermediate to advanced

312 pages

8h 50m

English

William Andrew

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1.1 Philosophy of Micro/Nanofabrication1.2 The Industry–Science Dualism1.3 Industrial Applications1.4 Purpose and Organization of this BookREFERENCES
2.1 Photolithography2.2 Thin Films2.3 Silicon Micromachining2.4 Industrially Established Non-Silicon Processing2.5 ConclusionsREFERENCES
3.1 LIGA3.2 Deep Reactive Ion Etching3.3 Micro-Ceramic Processing3.4 Speciality Substrates3.5 Advanced Non-Silicon and Silicon Hybrid Devices3.6 Planar Lightwave Circuits3.7 Fabrication Example of an Integrated Optical Device3.8 Integrated Optics in the MST Foundry Service Industry: A Case Study3.9 ConclusionsREFERENCES

4.1 Top-Down, Bottom-Up4.2 Nanomaterials4.3 Where Are We?4.4 Where to Go from Here?REFERENCES
5.1 Application Fields5.2 Overview of Materials5.3 Thick and Thin Film Hybrid Materials5.4 Microactuation5.5 Packaged Sensors5.6 Silicon as a Mechanical Material in Resonant Microdevices5.7 Information Society5.8 ConclusionsREFERENCES
6.1 Application Field6.2 Sensor Principles for the Collection of (Bio)Chemical Information6.3 Integrated chemFET Device: Case Study of a Semiconductor-Based pH Sensor Development6.4 Integrated Clinical Diagnostics: A Medical Application for Electrochemical Sensor Arrays6.5 ConclusionsREFERENCES
7.1 Application Fields7.2 Microfluidic Components7.3 Controlled Transport by Diffusion7.4 Integration for Microfluidic Transport, Sensing and Dispensing7.5 Lab-on-a-Chip7.6 Device-to-World Connections: The MATAS Concept7.7 From the Lab Bench to Industry: Microchip Capillary Electrophoresis7.8 ConclusionsREFERENCES
8.1 Microneedle Research at University of Twente and its Spin-Off8.2 MNA-4-Insulin: A Brief Evaluation8.3 ConclusionsREFERENCES
9.1 Environmental Aspects9.2 Health Aspects of Nanoparticles9.3 ConclusionsREFERENCES

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Author Biography

Regina Luttge was born and grew up in Germany, where she was awarded a BEng by the RheinMain University of Applied Sciences in 1993. She received an Erasmus award and spent half a year at the University of Central Lancashire, UK, where she was introduced to research studying liquid crystals. From 1994 to 1999 she had been working in Research & Development at the Institut für Mikrotechnik Mainz, Germany, first as a process engineer facilitating a variety of LIGA projects utilizing x-ray lithography and subsequently as a researcher on the application of electron-beam lithography for x-ray masks. She then undertook research in the field of microsystems technology at the University of London, Imperial College, UK, under the supervision ...