September 2011
Intermediate to advanced
312 pages
8h 50m
English
Content preview from Microfabrication for Industrial Applications
Become an O’Reilly member and get unlimited access to this title plus top books and audiobooks from O’Reilly and nearly 200 top publishers, thousands of courses curated by job role, 150+ live events each month,
Start your free trial
Chapter 3
Advanced Microfabrication Methods
Chapter Contents
3.1 LIGA
3.2 Deep Reactive Ion Etching
3.3 Micro-Ceramic Processing
3.3.1 Micromolding
3.3.2 Ceramic Microparts by LIGA
3.3.3 Utilizing Capillaries for Ceramic Micromolding
3.3.4 Utilizing Soft-Mold Replication
3.3.5 Ceramic Patterning on Curved Substrates
3.3.6 Patterning Ceramic Materials at Nanoscale Resolution
3.4 Speciality Substrates
3.4.1 Silicon-on-Insulator (SOI)
3.4.2 Electro-Optic Substrates
3.5 Advanced Non-Silicon and Silicon Hybrid Devices
3.5.1 Nanofabrication of Information Storage Devices
3.5.2 Integrated Optics
3.6 Planar Lightwave Circuits
3.7 Fabrication Example of an Integrated Optical Device
3.8 Integrated Optics in the MST Foundry Service Industry: A Case Study ...