Chapter 3
Advanced Microfabrication Methods
Chapter Contents
3.1 LIGA
3.2 Deep Reactive Ion Etching
3.3 Micro-Ceramic Processing
3.3.1 Micromolding
3.3.2 Ceramic Microparts by LIGA
3.3.3 Utilizing Capillaries for Ceramic Micromolding
3.3.4 Utilizing Soft-Mold Replication
3.3.5 Ceramic Patterning on Curved Substrates
3.3.6 Patterning Ceramic Materials at Nanoscale Resolution
3.4 Speciality Substrates
3.4.1 Silicon-on-Insulator (SOI)
3.4.2 Electro-Optic Substrates
3.5 Advanced Non-Silicon and Silicon Hybrid Devices
3.5.1 Nanofabrication of Information Storage Devices
3.5.2 Integrated Optics
3.6 Planar Lightwave Circuits
3.7 Fabrication Example of an Integrated Optical Device
3.8 Integrated Optics in the MST Foundry Service Industry: A Case Study ...
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